Boltzmann Equation Analysis of the Electron Gas in CF4 Discharge Plasma

The electron energy distribution function in CF4 gas discharge was numerically calculated for density reduced electric field E/N = 15 ‐ 300 × 10−17 Vcm2 using the Boltzmann kinetic equation. The momentum transfer and vibrational cross‐sections were derived from available experimental swarm parameters while the cross‐sections for inelastic electron‐molecule collisional processes included were taken from the literature. The two‐term spherical harmonic expansion of the distribution function was used in the calculations.