Comparison of C doping technique between SiC and C targets for high-photoresponsivity BaSi 2 films by radio-frequency sputtering

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High-photoresponsivity BaSi 2 films is of great importance for solar cell applications. The photoresponsivity was enhanced greatly in C-doped BaSi 2 films formed by sputtering BaSi 2 and SiC or C targets. The shift of Raman peak and optical absorption edge with increasing C concentration ( n C ) showed that more C atoms were incorporated in BaSi 2 films when the SiC target was sputtered. When n C was 6 × 10 20 cm −3 by the SiC target, the photoresponsivity approached 2 A W −1 under a bias voltage of 0.1 V between the top and bottom electrodes. This is the highest value ever reported for BaSi 2 films.