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A sandwich-type multidegree-of-freedom (MDOF) spherical ultrasonic motor (SUSM) is newly proposed. The motor consists of a spherical rotor and two stator vibrators holding the rotor. This structure has both a rotor support and a preload mechanism. The stator excites five vibration modes, and the rotor can rotate on three axes. An experiment of a torque composition of two stators was carried out. The contact surface between the rotor and the stators forms a spherical surface. Moreover, a displacement magnification mechanism, which was used in the former model to rotate on theZ-axis, is no longer necessary. Hence the stator is simpler in construction than the former model. In this paper, we describe the construction and the operating principle of the MDOF ultrasonic motor, modal analysis results for the stator, and some measurement results from trial manufacturing. The miniaturization of the motor and increase in torque were successfully realized.
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Lu et al. (2010) studied this question.
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