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A cylindrical piezoelectric vibrator 0.8 mm in diameter was fabricated by micromachining. In this paper, a micro ultrasonic motor 1.8 mm in casing diameter that uses this micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the piezoelectric vibrator, a glass case, a bearing, and a rotor. The vibration velocity of the cylindrical vibrator was 715 mm/s when the driving frequency was 69 kHz and the driving voltage was 40 V p–p . Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator, and the motor has a simple structure. In addition, the vibrator and rotor were supported by glass case. As the case was made of glass, a suitable vibration mode of the driving of the motor was obtained. We have fabricated and evaluated the cylindrically shaped traveling micro-ultrasonic motor using this vibrator.
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Kanda et al. (2006) studied this question.
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