A new algorithm for determining the optical parameters of deposited multilayer optical coatings based on comparing the positions of the extrema of the optical characteristics of multilayer optical coatings is proposed. Two versions of this algorithm are compared. Using a series of numerical simulation experiments, the advantage of one of these versions is demonstrated. It is shown that this version decreases the influence of systematic errors in the spectral data.
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Isaev et al. (2017) studied this question.
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