The output properties of hydrogen light sources and the resist parameters, such as spectral sensitivity and absorption coefficient, in the vacuum-ultraviolet (VUV) region were investigated. A very low exposure energy of about 1 mJ/cm2 was obtained by employing a very thin polymethyl methacrylate film and the VUV light of hydrogen microwave discharge. Contact photolithography using a Si/MgF2 mask and a trilayer resist system showed that submicron patterns as small as 0.2 µm had been replicated at an exposure time of under 30 s.
No takes yet. Share an insight, caveat, or question.
Kudo et al. (1990) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: