Effect of the substrate temperature on the properties of RE–Fe–B thin film magnets

We report a systematic study of the structural, morphological, and magnetic properties of RE–Fe–B films prepared by magnetron sputtering on thermally oxidized Si substrates heated to temperatures Ts in the range between Ts∼470 and ∼800°C during the deposition. The combination of crystallographic texture and mechanical and hard magnetic properties was observed for Ts∼470°C, which results in better mechanical, textural, and hard magnetic properties in terms of perpendicular remanence (0.97T), coercivity (420kA∕m), and maximum energy product (136kJ∕m3).