Effective vehicle dispatching method minimising the blocking and delivery times in automatic material handling systems of 300 mm semiconductor fabrication

This paper proposes an efficient vehicle dispatching rule which minimises the vehicle blocking and delivery times in automatic material handling systems of 300 mm semiconductor manufacturing. In order to evaluate the performance of the proposed dispatching method, discrete event simulation models were developed. The results show that the proposed method has a significant impact on average delivery time, throughput and vehicle utilisation. In particular, it reduces the variance of the delivery time remarkably.