The deflection of a substrate caused by an anisotropic stress in a thin film that is deposited on it, is studied theoretically. An exact solution of the elastic equations for the three-dimensional cantilever problem is found. Equations for the deflection caused by anisotropic stresses due to, e.g., magnetostriction and by isotropic stresses are given. A comparison is made between these equations and the equations usually given in the literature for the determination of thin-film stresses.
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E. van de Riet (1994) studied this question.
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