Soft magnetic properties of new Fe-Cr-N and Fe-Cr-Ta-N alloy films have been investigated. Thin films with compositions in the range of Fe-2∼8% Cr-0∼1% Ta-5∼15% N (in at. %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post heat treatment, e.g., Hc∼1–2 Oe (79.4–158.8 A/m) and 4πMs∼15–20 kG. The easy-axis M-H loop is square. The hard-axis loop is linear and closed, with the anisotropy field Ha=20–60 Oe (1.59–4.77 kA/m). The combination of high 4πMs and relatively high Ha in these films is conducive to the suppression of the undesirable ferromagnetic resonance (FMR) interference up to the GHz frequency range.
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Jin et al. (1997) studied this question.
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