Soft magnetic FeTaN and novel FeTaN/AlN multilayer films with a saturation flux density of /spl sim/20 kG are obtained on both planar and sloping substrates. Flat frequency responses extend over 500 MHz for as-deposited 1000 /spl Aring/-thick FeTaN films. The 3 dB roll-off frequency for as-deposited 1 /spl mu/m-thick (FeTaN/ AlN)/sub 10/ laminates is only /spl sim/330 MHz. However, when the laminates are patterned into 20 /spl mu/m-wide strips along the hard axis, the frequency response improves and the 3 dB roll-off frequency is over 500 MHz, which offers the promise of data rates of over 1 Gb/s.
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Hong et al. (1999) studied this question.
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