The effects of base layers with different crystal structures and well defined growth textures on the soft magnetic properties of FeTaN films have been studied. Broadly speaking, base layers with fcc or hcp crystal structures and having predominantly (111) and (0002) growth textures, respectively, significantly improve the soft magnetic properties of the subsequently deposited (110) textured bcc FeTaN films. Base layers with bcc crystal structures and (110) growth textures either degrade the soft magnetic properties or have little effect.
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Inturi et al. (1996) studied this question.
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