In-plane biaxial anisotropy in permeability, desired for integrated inductor cores, was achieved using a composite-anisotropy sandwiched structure. With Tb-doped CoTaZr alloy as the material for magnetic layers, the permeability of the composite film was close to 50% of that of blanket film along the easy axes of both top and bottom magnetic layers, and the ferromagnetic-resonance frequencies were about 2GHz. Simulations show that the integrated inductors with the composite film as their magnetic cores have inductances near a half of that for the ideal isotropic permeability case.
No takes yet. Share an insight, caveat, or question.
Lee et al. (2005) studied this question.