Experimental study demonstrates dynamic stress sensing in diamond cantilevers via integrated NV centers, highlighting a path for robust microelectromechanical sensors.
Key Points
To evaluate whether intrinsic nitrogen-vacancy centers in a micromachined single-crystal diamond cantilever can dynamically detect vibration-induced bending stress without attached nanodiamonds.
Fabricated a single-crystal diamond microelectromechanical cantilever using an ion-implantation-induced buried graphite sacrificial-layer release process.
Used an intrinsic region containing nitrogen-vacancy centers near the defective layer directly as the localized stress-sensing element.
Applied optically detected magnetic resonance spectroscopy with an aligned static magnetic field to measure spectral peak shifts during cantilever vibration.
Optically detected magnetic resonance peak shifts reliably identified uniaxial stress generated by cantilever vibration.
Spectral peak shift magnitudes increased monotonically with greater vibration amplitude.
Observed peak shifts exhibited periodic dynamic modulation that synchronized directly with the cantilever's mechanical vibration phase.