Dynamics of plasma–surface processes: E–R and L–H atom recombination reactions

The dynamics and energetics of dissociative chemisorption and atom recombination reactions relevant to plasma–wall and plasma–surface processes are discussed in the light of recent progress in molecular dynamics and electronic structure studies on elementary heterogeneous systems. Emphasis is given to the Langmuir–Hinshelwood and Eley–Rideal recombination processes involving H and its isotopes adsorbed on various substrates at different surface temperatures and collisional energy regimes.