Electron and positron impact ionization cross sections of SiF4

Based on the Binary-Encounter-Bethe (BEB) model, we present comprehensive cross-sectional data on total ionization cross sections, partial cross sections, single differential cross sections, average secondary electron energy and stopping cross sections for the SiF4 molecule in the case of electron and positron impact. For the partial cross sections, we employ the mass spectrum data (MSD) method and Huber’s model. By comparing theoretical calculations with experimental measurements, we determine the fragmentation pattern of SiF4. For positron scattering, we utilize three methods known as BEB0, BEBA, and BEBW. There is limited data of electron impact available on SiF4, and there is a notable lack of relevant investigations regarding positron impact with SiF4. Our research continues the exploration of electron and positron impact cross sections for SiF4 and serves as a reference for future studies.