By using a low SEM accelerating voltage in the range of 5–7·5 kV with an electron backscatter diffraction system, the interaction volume of electrons with matter is markedly decreased, and the spatial resolution is improved. The authors present measurements which prove this relationship. Electron backscatter diffraction at low acceleration voltage, however, is not a straightforward technique with the current equipment and a standard set-up. The authors show that an optimised working distance and dedicated sample preparation are essential to obtain improved spatial resolution for detailed nanoscale microstructure investigations.
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Steinmetz et al. (2010) studied this question.
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