Numerical analysis of tiny-focal-spot generation by focusing linearly, circularly, and radially polarized beams through a micro/nanoparticle

Obtaining a tiny focal spot is desired for super resolution. We do a vectorial numerical analysis of the linearly, circularly, and radidally polarized electromagnetic fields being focused through a dielectric micro/nanoparticle of size comparable to the wavelength. We find tiny focal spots (up to ∼ 0.05 λ 2 ) can be obtained behind micro/nanoparticles of various shapes, e.g. spherical, disk-shaped, and cuboid micro/nanoparticles. Furthermore, we also investigate the influence of the misalignment of a real lens system on the tiny focal spots. We find that tiny focal spots can still be generated even though they are distorted due to the misalignment.