The annealing effects of perpendicular MgO/CoFeB/Ta structure are investigated with ferromagnetic resonance technique. The data of angular dependent resonance field, linewidth, and intensity are obtained for both as-grown and annealed samples. An increment of magnetic out-of-plane anisotropy field from 1800 to 3300 Oe with annealing is observed, which should be related to the improvement of crystalline at the interface. Ferromagnetic resonance linewidth significantly broadens after annealing, and this broadening is attributed to the enhancement of inhomogeneity of the internal field.
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Chen et al. (2012) studied this question.