Fabrication of an electrostatic track-following micro actuator for hard disk drives using SOI wafer

This paper presents track-following control using an electrostatic microactuator for super-high density hard disk drives (HDDs). The electrostatic microactuator, a high aspect ratio track-following microactuator (TFMA) which is capable of driving 0.3??g magnetic head for HDDs, is designed and fabricated by a microelectromechanical systems process. It was fabricated on a silicon on insulator wafer with a 20??m thick active silicon layer and a 2??m thick thermally grown silicon dioxide layer; a piggyback electrostatic principle was used for driving the TFMA. The first vibration mode frequency of the TFMA was 18.5?kHz, which is enough for a recording density of higher than 10?Gb?in-2. Its displacement was 1.4??m when a 15?V dc bias plus a 15?V ac sinusoidal driving input was applied and its electrostatic force was 50.4??N when the input voltage was 30.7?V. A track-following feedback controller is designed using a feedback nonlinear compensator, which is derived from the feedforward nonlinear compensator. The fabricated actuator shows 7.51?dB of gain margin and 50.98? of phase margin for a 2.21?kHz servo bandwidth.