We report the microfabrication and characterization of SrTiO3∕SiO2∕Si ridge waveguides. SrTiO3 films are very attractive for optical integrated systems as they present a high transparency in the visible and infrared wavelength range as well as a relatively high refractive index. In this work, SrTiO3 films were grown by means of a reactive pulsed-laser-deposition technique and patterned using UV photolithography and high-density plasma etching. Propagation and loss characteristics at the telecommunication wavelength of 1.55μm were investigated using top-view scattering and Fabry-Perot resonance methods. For specific ridge widths, we obtained single-mode propagation with relatively low losses (∼1.5dB∕cm), thereby demonstrating the strong potential of SrTiO3 films for guided-wave components for advanced optical integrated systems.
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Gaidi et al. (2005) studied this question.
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