The design, fabrication and characterization of a silicon microheater for an integrated MEMS gas preconcentrator

We report the design and fabrication of a microheater unit as a key component of an integrated micro gas preconcentrator that has an ultra-small preconcentrator volume (<0.25 µL) and microvalves for fast injection speeds (<1 ms). Monolithic integration of the microvalves into the microheater of the preconcentrator gives rise to challenges in designing the microheater and implementing thermal isolation for low power and energy consumption. A preconcentrator chamber, 3.5 × 1.5 mm 2 in planform area and 40 µm deep, was built in the device layer of a silicon-on-insulator wafer and filled with an array of microposts with a preconcentrator volume of 0.2–0.25 µL. Different generations of the microheaters and their mating dies were fabricated to show the effects of thermal isolation and thermal mass of the system on the performance of the heater. The microheater assembly with the least thermal mass and most thermal isolation can reach 300 °C in 100 ms with 12.3 W of power and is expected to consume less than 2 J during the operation of each preconcentration cycle.