Nondestructive visualization of the internal structure of an object is necessary, for instance, in microbiology, laboratory physical experiments, and microelectronics. Computerized reconstruction tomography (CT) can be used for this purpose. This article deals with SEM‐based microtomography Examples are presented of restoring images formed with x‐rays and light [cathodoluminescence (CL)]. The potentialities of the Lorentz tomography of two‐dimensional stray magnetic fields are demonstrated.
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Э. И. Рау (1988) studied this question.
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