Technological Advances in the Manufacture of Radiation-Hardened CMOS Integrated Circuits

Advances in the ''Wet Oxide Process'' that have resulted in multimegarad hardness and yield to MIL-M-38510 screening requirements are described. The implementation of these advances into volume manufacturing capabilities is geared toward supplying devices for aerospace requirements such as the Defense Meteorological Satellite Program (DMSP) and the Global Positioning Satellite (GPS).