We demonstrate coaxial atomic force microscope (AFM) tweezers that can trap and place small objects using dielectrophoresis (DEP). An attractive force is generated at the tip of a coaxial AFM probe by applying a radio frequency voltage between the center conductor and a grounded shield; the origin of the force is found to be DEP by measuring the pull-off force versus applied voltage. We show that the coaxial AFM tweezers can perform three-dimensional assembly by picking up a specified silica microsphere, imaging with the microsphere at the end of the tip, and placing it at a target destination.
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