Modeling and Inverse Compensation for Coupled Hysteresis in Piezo-Actuated Fabry–Perot Spectrometer

An imaging Fabry-Perot spectrometer (FPS) utilizes multiple piezoelectric actuators (PEAs) to tune the gap spacing between two optical lenses at nanometer level in order to scan the desired optical band. Due to the nonlinear hysteresis in PEAs and the mechanical coupling, the output responses of the PEAs are quite different, which cause unparallel movement of the FPS positioning stage. For precise positioning control, a model for describing the coupled hysteresis effect is proposed in this paper and a decoupling hysteresis feedforward compensator is constructed based on this model. Experimental results show that the proposed model predicts the coupled hysteresis effect very well and the compensator mitigates the coupled hysteresis efficiently.