Influence of Anodization Current Density on Preparation and Corrosion of n-Type Macroporous Silicon in 1.0 M NaOH

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The n-type macroporous silicon samples were prepared by electrochemical anodization of n-type silicon wafers in etching solution of HF(40%):EtOH(99.5%)=1:1 with different current density for 20 min. The dissolution of n-type silicon wafers in etching solution conform Faraday's laws of electrolysis. The fabricated n-type macroporous silicon with different porosity and thickness corrosion in 1.0 M NaOH was systemically studied by weight loss measurements, potentiodynamic polarization measurements and scanning electron microscope. Results show that the corrosion rate of n-type macroporous silicon in 1.0 M NaOH increases with anodization current density and porosity increasing, respectively. In addition, the increase of corrosion rate for n-type macroporous silicon prepared with relative higher anodization current density was determined by the activation energy.