Space charge limited transient currents and oxygen vacancy mobility in amorphous BaTiO3 thin films

Time-dependent transient currents were studied at elevated temperatures (200–220°C) in amorphous barium titanate thin film capacitors. Current transients display a peak whose time position varies with applied voltage and temperature. The response is analyzed through space charge limited current transient theories. Extracted drift mobilities are in the 10−11–10−12cm2V−1s−1 range and show an activation energy of 1eV. The phenomena are associated with oxygen vacancies migration in BaTiO3.