We have previously reported (K,Na)NbO 3 (KNN) films, whose piezoelectric properties are the highest reported thus far. In this study, we investigate the detailed crystalline structures of these KNN films after deposition on Pt/MgO and Pt/Ti/SiO 2 /Si substrates by RF magnetron sputtering. The KNN film on Pt/MgO was epitaxially grown on the Pt lower electrode with a perfect <001> orientation in the perovskite structure. The KNN film on Pt/Ti/SiO 2 /Si was polycrystalline with a preferential <001> orientation in the perovskite structure having dense columnar grains. X-ray diffraction measurements revealed that the KNN films grown on Pt/MgO and Pt/Ti/SiO 2 /Si were tetragonal; the lattice parameters c and a were related as c / a > 1. The KNN film on Pt/MgO had a higher c / a value than the KNN film on Pt/Ti/SiO 2 /Si, indicating that the former had more compressed strain. We conclude that this difference in compressed strain may contribute to the difference in piezoelectric properties of the KNN films on Pt/MgO and Pt/Ti/SiO 2 /Si.
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Shibata et al. (2008) studied this question.
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