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November 1, 1975Japanese Journal of Applied PhysicsOpen Access

Phosphorus Diffusion in Silicon Free from the Surface Effect under Extrinie Conditions

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Authors

SMSatoru MatsumotoTohoku UniversityEAEisuke AraiNagoya University HospitalHNHiroaki NakamuraIdemitsu Kosan (Japan)

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Cite This Study

Matsumoto et al. (1975) studied this question.

synapsesocial.com/papers/6a950bcc2fdd6c151ff21b83https://doi.org/10.1143/jjap.14.1665
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