Fabrication of planar dielectric waveguides with high optical damage threshold

We realized with a simple inexpensive process planar dielectric waveguides for the visible with the following improved properties: The waveguiding layers are mixed oxide films (∼40 percent TiO2in SiO2). They are hard and durable against mechanical and chemical attack. The losses are low and comparable to other planar waveguide materials. The films withstand high energy densities and intensities for pulsed and CW Laser irradiation, respectively.