We report a piezoelectric standing wave linear ultrasonic motor with double driving tips for generating precision motion. The motor's piezoelectric actuator was made of a simple Pb(Zr,Ti)O3 square-plate (15 × 15 × 2 mm3) operating in a single face-diagonal-bending standing wave mode to produce symmetric, bi-directional linear motion. The motor generated a driving force of 3.0 N and a moving speed of up to 165 mm/s under a relatively low applied electric field of 75 Vpp/mm at a resonance frequency of 141.5 kHz. This motor is superior to those previously reported because of the double friction-tip standing wave driving mechanism and the operating mode.
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Ci et al. (2013) studied this question.
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