Answers are grounded in this paper and cite their sources.
A simple method using an 800-nm femtosecond laser and chemical selective etching is developed for fabrication of high-aspect-ratio grooves in silicon carbide. Micro grooves with an aspect ratio of approximately 40 are obtained. The morphology and chemical compositions of the grooves are analyzed using a scanning electronic microscope equipped with an energy dispersive x-ray spectroscopy. The formation mechanism of SiC grooves is attributed to the chemical reactions of the laser induced structural changes with a mixed solution of hydrofluoric acid and nitric acid. In addition, the effects of laser irradiation parameters on the aspect ratio of the grooves are investigated.
No takes yet. Share an insight, caveat, or question.
Khuat et al. (2014) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: