Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements

The optical constants of a thin film on its structure. A technique, based on transmission measurements carried out in vacuo, has been developed to derive the profiles of the refractive index and extinction coefficient. The interpretation of the profiles gives information on the layer structure in vacuo. The technique can be used as a means of monitoring the variations of the optical constants with changes in the deposition parameters. This paper presents the technique, which is based on an envelope method, and gives some experimental results.