Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications, Gosálvez, M A, Tang, B, Pal, P, Sato, K, Kimura, Y, Ishibashi, K
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Gosálvez et al. (2009) studied this question.
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