PIC – MCC Numerical Simulation of a DC Planar Magnetron

Summary: A 2d3v numerical model of a DC sputter magnetron is presented. The model is fully self‐consistent and kinetic. Based on the Particle‐in‐Cell/Monte Carlo Collisions technique it includes modules for the gas heating and the diffusion transport of the sputtered atoms. An external electric circuit is incorporated to achieve the calculation of the cathode voltage in a self‐consistent manner, as well as the simulation of the constant current regime. The model is applied to a laboratory magnetron operated in argon. Calculated distribution of the electric potential, V, at p = 10 mTorr. The white line corresponds to V = 0 V. image Calculated distribution of the electric potential, V, at p = 10 mTorr. The white line corresponds to V = 0 V.