Simulation of ionization in a magnetron-like glow discharge

A Monte Carlo technique has been used to simulate ionization in a magnetron-like model. Spatial distribution of ionization as well as electron loss under non-uniform magnetic fields of various strengths has been investigated. It is found that ionization increases with the magnetic field over a wide range ( approximately 0.15 T), but due to electron loss via cathode absorption it decreases at strong fields. With increasing field strength, ionization is found close to the cathode, concentrated at the place where the magnetic field is parallel to the cathode surface, and dominant at the E*B drift direction. It is also found that electron loss is decreased by the confinement given by the non-uniform magnetic field component parallel to the electric field, while, increased by the E*B drift in the model and increased by the cathode absorption when the magnetic field is made stronger. Analyses of the results are given; the results can be applied to magnetron discharges.