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The scattering of s-polarized electromagnetic waves by a two-dimensional scatterer upon a surface is considered. An integral approach previously reported is generalized in order to account for multilayer systems. In order to compare the theory with scattered-light measurements, we have fabricated two ribs upon a germanium substrate by means of a dry-etching technique. The height and width of the ribs are approximately 5 μm. The ribs are separated by 15 μm, whereas the incident wavelength is 10.6 μm. A good agreement is found between theory and experiment.
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Greffet et al. (1991) studied this question.
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