iGC2 : an architecture for micro gas chromatographs utilizing integrated bi-directional pumps and multi-stage preconcentrators

This paper reports an integrated micro gas chromatography (µGC) architecture which utilizes a bi-directional micropump. Four integral components-–the bi-directional Knudsen pump (KP2), a two-stage preconcentrator-focuser (PCF2), a separation column, and a gas detector-–are integrated in a 4.3 cm 3 stack, forming a serial flow path. All four components are fabricated using the same three-mask process. Compared to the conventional approach used with multi-stage preconcentrators, in which valves are used to reverse flow between the sampling phase and the separation phase, this µGC architecture reduces the overall complexity. In this architecture, the vapors being sampled are drawn through the detector and column before reaching the PCF2. The microsystem operation is experimentally validated by quantitative analyses of benzene, toluene, and xylene vapors ranging in concentration from 43–1167 mg m −3 .