Practical scheme for three-dimensional simulation of electron cyclotron resonance plasma reactors

A three-dimensional simulation code which calculates wave propagation, plasma transport, and gas phase chemical reactions self-consistently in an electron cyclotron resonance plasma reactor has been developed. The code is designed to treat the three-dimensional inhomogeneity with a reasonable accuracy in a realistic configuration of the reactor within an acceptable computational time using common computer resources. The profiles of electromagnetic wave fields and the temporal evolution of plasma parameters and radical densities in a bounded, inhomogeneous, cylindrical system have been calculated. The code can resolve azimuthal asymmetry of the plasma associated with a rectangular waveguide coupling or an asymmetric injection of reactive gases as well as the radial and axial variations.