A newly designed low-driving-voltage X-cut lithium niobate optical modulator with a two step backside slot is proposed. This modulator was fabricated with micro-machining technology utilising excimer laser ablation. The modulation bandwidth of this modulator achieves 25 GHz and the driving voltage is 2.8 V at 1 kHz.
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Kondo et al. (2002) studied this question.
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