We report the results of loss measurements for guided waves in silicon-on-insulator (SOI) optical waveguides formed by the bond-and-etchback process. Losses as low as 2.6 (2.0) dB/cm were found for the TE0 (TM0) mode for wavelength λ=1.319 μm. Grating coupling into these waveguides is demonstrated and discussed.
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Evans et al. (1991) studied this question.
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