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The wet oxidation kinetics of AlAs layers of interest in vertical cavity surface emitting laser (VCSEL) fabrication are investigated in detail. The process is modeled as a diffusion-reaction process. For oxidation over a long time interval, variation of the oxidation rate with the variation of the radius of the etched mesa of the VCSEL is observed. A theory has been developed to obtain the rate equation of the oxidation process and the dependence of the oxidation rate on the size of the VCSEL is explained.
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Koley et al. (1997) studied this question.
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