Large-Scale Fabrication of Carbon Nanotube Probe Tips for Atomic Force Microscopy Critical Dimension Imaging Applications

We report an innovative approach that combines nanopatterning and nanomaterials synthesis with traditional silicon micromachining technologies for large-scale fabrication of carbon nanotube (CNT) probe tips for atomic force microscopy imaging applications. Our batch fabrication process has produced 244 CNT probe tips per 4-in. wafer with control over the CNT location, diameter, length, orientation, and crystalline morphology. CNT probe tips with diameters ranging between 40 and 80 nm and lengths between 2 and 6 μm are found to be functional probe tips with no need for shortening. This reliable and true bottom-up wafer scale integration and fabrication process provides a new class of high performance nanoprobes. Preliminary AFM imaging results show that the CNT probe tips are strong, wear-resistant, and capable of high-resolution and critical-dimension imaging.