In this work, a new method was developed to increase the stiffness of polydimethylsiloxane (PDMS) masters using SU-8 truss structures, aimed at reducing residual deformations of the PDMS masters induced in the molding process. Using this method, both global and local residual deformations in the released PDMS master have been reduced.
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Govindaraju et al. (2005) studied this question.
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