The power-conversion efficiency of SnO2/Si solar cells fabricated by electron-beam evaporation of SnO2 is strongly dependent on the angle of incidence of the SnO2 vapor stream on silicon. The optimum angle of incidence is between 50° and 70°. Solar cells with power-conversion efficiencies exceeding 10% have been reproducibly fabricated by depositing the SnO2 at angles of incidence in this optimum range.
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Feng et al. (1979) studied this question.
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