Laser-assisted photochemical etching of Hg0.8Cd0.2Te

A laser-assisted photochemically driven etching process has been developed for Hg0.8Cd0.2Te (12 μm material). It is an etch which does not melt the surface of the material or induce mercury migration. Small geometry features (vias less than 10 μm in diameter) with straight-edged sidewalls have been produced. The etching mechanism is a photoenhanced rapid oxidation with subsequent solvation of the oxides.