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KrF excimers are produced by irradiating the gas mix of Kr and F2 with KrF laser radiation at 248 nm. The excitation process is identified as a photoassociation process between colliding Kr and F atoms via photodissociation of F2 molecules. The present success has made it possible to investigate the collisional processes of KrF excimer quantitatively.
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Hakuta et al. (1988) studied this question.
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