Elastic recoil detection analysis (ERDA) was performed to determine hydrogen concentration profiles near the (100) surfaces of epitaxially grown diamond films. Microwave plasma chemical vapor deposition (CVD) was used for the growth. At the end of the growth, the substrates were treated with and without exposure to H2/O2 plasma. The areal density of hydrogen determined by ERDA ranged from 5 to 7 ×1015 atoms/cm2 near the surface of the specimens. These areal densities were 3–4 times larger than that of C atoms on ideal (100) surface of diamond (∼1.6 ×1015).
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Yagi et al. (1995) studied this question.
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