Line edge roughness (LER) measurements using two types of atomic force microscopes and three types of tips are compared. Measurements were made on specially prepared samples with inscribed edge roughness of different amplitudes and wavelengths. The spatial wavelengths and amplitudes each instrument was able to measure are compared. Techniques on checking the noise level of LER measuring instruments are highlighted.
No takes yet. Share an insight, caveat, or question.
Orji et al. (2005) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: